O le WF6 o loʻo faʻaaogaina e avea o se mea mataʻutia mo le faʻaogaina o le vailaʻau (CVD) o le tungsten uʻamea i totonu o pisinisi eletise. WSi2 faia mai le WF6 e mafai ona faʻaaogaina e avea o se mea faʻapipiʻi i le tele-scale integrated circuits (LSI), ma e mafai foi ona faʻaaogaina e avea o se mea mata mo electrodes semiconductor, fluorine Raw mea mo vailaʻau vailaʻau, polymerization catalysts, mea faʻapipiʻi, ma isi.